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Thin film deposition ion etching coating instrument

Ion etching coating instrument PECS II

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The GATAN second generation precision etching coating instrument (PECS II) is a desktop wide beam argon ion polishing, coating and film thickness measuring equipment. For the same sample, polishing and coating can be completed in the same vacuum environment. The equipment uses two wide beam argon ion sources to polish the sample surface and remove the damage layer to obtain high quality samples. It is used for imaging with SEM, light microscope or scanning probe microscope.