GeminiSEM 500 is a field emission scanning electron microscope (FE-SEM). The high resolution, high contrast and high signal-to-noise ratio images can be obtained through two electronic tests and scattered electronic detection. The resolution of the accelerated voltage 15kV is up to 0.6Nm. At the same time, Oxford Aztec Xmax 50 X ray spectrometer is provided. The system is widely used in micro area imaging and component analysis.