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Photolithography equipment - UV photolithography

UV exposure system SUSS MJB4

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MJB4 is a high precision manual mask lithography machine, suitable for 10x10 mm and 20x20 mm chips; 1 inch square and 4 inch wafers. A short (seconds) UV radiation pulse from mercury (Hg) lamp is irradiated by a glass / cadmium mask to irradiate the wafer coated with photoresist (PR). It is widely used in the field of MEMS and optoelectronics.

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